Micro- and nanopatterning using scanning electrochemical microscopy.

Citation:

Daniel. Mandler. 2013. “Micro- And Nanopatterning Using Scanning Electrochemical Microscopy.”. In Scanning Electrochem. Microsc. (2Nd Ed.), Pp. 489 - 524. CRC Press. Date Presented: 2013///.

Abstract:

A review. The following topics are discussed: Patterning by the Direct and Feedback modes of the SECM (Semiconductor, metal, and inorg. material etching and deposition; deposition of conducting polymers; self-assembled monolayers, polymers, and biomol. patterning); Speed of patterning, resoln., and scope of materials and approaches. [on SciFinder(R)]